| About this Abstract |
| Meeting |
2011 Electronic Materials Conference
|
| Symposium
|
2011 Electronic Materials Conference
|
| Presentation Title |
W5, Quasi Equilibrium Crystal Shapes and Kinetic Wulff Plots of Gallium Nitride Grown by Hydride Vapor Phase Epitaxy |
| Author(s) |
Benjamin N. Bryant, Asako Hirai, Shuji Nakamura, James S. Speck |
| On-Site Speaker (Planned) |
Benjamin N. Bryant |
| Abstract Scope |
In this presentation we demonstrate work on developing the kinetic Wulff plots and quasi equilibrium crystal shapes of GaN by hydride vapor phase epitaxy. The pursuit of these was to explore the stable semi polar planes that emerge naturally from the GaN crystals and to also examine the non-polar a and m plane stability. The kinetic Wulff plots and quasi equilibrium crystal shapes reveal the stable growth planes and features for differing growth conditions. This work is differentiated from previous work of Han et al and Hirai et al by the use of stacking fault free high quality bulk GaN substrates, thus avoiding any constrained features due to stacking fault generation from heteroepitaxy. The difference in these growths can be seen where the numerous stacking faults appear in the slate like morphology of the defective material but smooth facets emerge in the defect free material. These growths were performed by a conventional three zone horizontal growth system on high quality bulk m-plane GaN substrates. HVPE was employed due to the growths being closer to equilibrium than MOCVD, thus allowing for truer representation of the plots and equilibrium shapes. A dielectric mask of 140 nm thick SiNx was employed for the selective area growths. Circular openings of 5 µm diameter, with fill factors ranging from 01, 0.2, 0.3, and 0.4 were used to reveal the shapes of the growths. The QECS was shown to have clear m-plane facets and a sharp and flat c- face. The c+ face became faceted with (10-11) planes emerging. This work sheds light on the stable facets of the GaN crystal shape. |
| Proceedings Inclusion? |
Undecided |