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Meeting 2017 TMS Annual Meeting & Exhibition
Symposium Fracture Properties and Residual Stresses in Small Dimensions
Presentation Title Temperature-Dependent Delamination Failure of Metal-Ceramic Interfaces
Author(s) Rafael Soler, Sriram Venkatesan, Johannes Zechner, Michael Nelhiebel, Roman Roth, Josef Fugger, Gerhard Dehm
On-Site Speaker (Planned) Rafael Soler
Abstract Scope Delamination failure in modern microelectronic devices, where complex multi-layered structures are common, is known to be usually driven by thermal expansion mismatch stresses, both produced during the thin film fabrication process and during device operation (where multiple loading condition, e.g. temporal and spatial temperature gradients, are induced). In this work we shed some light on the delamination behavior of such complex structures under service temperatures, i.e. up to 400 C. We analyse the temperature dependency on the interface strength of bimaterial interfaces. The study focuses on various metal-ceramic interfaces, namely between a metallization layer (W, Ti, or Cu) and a borophosphosilicate glass (BPSG). The mechanical experiments are conducted by both, macro- and micro-scale approaches, i.e. 4-point-bending and single beam cantilever experiments, respectively. The temperature-dependent delamination behavior will be discussed with respect to the microstructural and chemical evolution from pre- and post-mortem samples.
Proceedings Inclusion? Undecided

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

Atomistic Simulations of Crack Nucleation and Propagation along Grain Boundaries
Brittle-to-ductile Transition of Quasicrystals at Small Scales: Cracking, Serrated flows, Diffusion and Phase Transformation
Constitutive Modeling of Indentation Cracking in Fused Silica
Coupling Discrete Dislocation Plasticity and Cohesive Zone Models
Critical Stresses in Intermittent Plasticity
Directional Dependency of the Fracture Behavior of High Strength Pearlitic Steel Wires
Enhanced Fracture Toughness of Mg/Nb Laminated Composites
Enhancing Ductility of Metal-Metal (BCC-HCP) and Metal-Ceramic Multilayered Nanocomposites
Extraordinary Stability of Clamped Beam Fracture Toughness Specimen: Stress Intensity Factor Solutions and New Insights on Possibilities at Small Dimensions
Fracture Toughness of Beryllium Using Insitu X-ray and Digital Image Correlation Techniques
High Temperature Mechanical Properties of Materials Synthesized from Graphene and Carbon Nanotubes
Improved Fracture Resistance of Brittle Molybdenum Thin Films on Polyimide with Stress Tailoring
In Situ Micron Scale Fracture Toughness Testing and Modeling of a Chevron Notched Bowtie-shaped Beam
In Situ Stable Crack Growth at the Micron Scale
In Situ Stable Fracture of Sapphire-Niobium Interfaces
Indentation Fracture Experiments on Single Crystal Olivine from 300K to 1100K
Liquid Metal Embrittlement at the Micro-scale: Gallium FIB vs. Xenon FIB
Measurement of the Fracture Toughness of Thin Films by Pillar Splitting: Effect of Materials Structure and Indenter Geometry
Micro-Compression Testing of Mg-Nb Multilayered Nano-Composites for Ultra-High Strength, Formability and Ductility
Nanoscale Strain Mapping of Individual Defects during In Situ Deformation
Orientation Dependent Fracture Behaviour of LiTaO3 and LiNbO3 Single Crystals
Oxide-induced Substrate Cracking in Ti and Stainless Steels Driven by Pulsed Laser Irradiation
SEM-based In-situ Fracture Measurements of Ceramics and Metals
Small-scale Testing Methodology to Study Fracture Toughness of Interfaces in Multilayered Systems
Studying Plasticity during Fracture at the Micron Scale by Means of Cantilever Experiments in Single-crystalline NiAl and W – HR-EBSD Analyses and Elevated Temperature Measurements
Temperature-Dependent Delamination Failure of Metal-Ceramic Interfaces
Tensile Deformation Behaviour of Notched Nano-scale Metallic Glass Specimens
The Surface Residual Stress of High-frequency Induction Brazing of Cemented Carbide to Alloy Steel

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