|About this Abstract
||2018 TMS Annual Meeting & Exhibition
||Bulk Metallic Glasses XV
||Damping, Elasticity, and Density of Sputtered Zr-Ni-Al Nano-films as Gleaned from Laser Interferometry
||Anthony Kwong, Matt Matheny, John Sader, Julia Greer
|On-Site Speaker (Planned)
To date, understanding the mechanical and physical properties of sputtered metallic glass thin films remain elusive. In particular, there are no reported values for the density of sputtered metallic glass thin films. Our research utilizes the Sader method, which relates the material density to its resonance frequency and the quality factor, to calculate the density of sputtered Zr-Ni-Al. We sputtered 960nm-thick Zr-Ni-Al onto Si substrates and lithographically patterned them into 2µm x 13µm free-standing cantilevers using photolithography and XeF<SUB>2</SUB> etching. Using our Fabry- Pérot laser interferometer setup, the micro-cantilevers were oscillated using a piezoshaker to measure the resonance frequency (1.94 ± 0.08 MHz) and quality factor (Q=417) of the Zr-Ni-Al films. We calculated a density of 6.1 g/cm<SUP>3</SUP>, which compares favorably with 6.33g/cm<SUP>3</SUP> for bulk Zr-Ni-Al. These findings suggest that laser interferometry can be used to accurately measure the density and Young’s modulus (38.3GPa) of thin films.
||Planned: Supplemental Proceedings volume