|About this Abstract
||2018 TMS Annual Meeting & Exhibition
||2018 Symposium on Functional Nanomaterials: Discovery and Integration of Nanomaterials
||M-2: Co/Pd Multilayered Nanodot Formation by Block Copolymer Templating
||Subhadra Gupta, Allen G. Owen, Hao Su
|On-Site Speaker (Planned)
Co/Pd multilayered films with perpendicular magnetic anisotropy were patterned using block copolymer templating in a study on bit-patterned media. In this method, diblock copolymers were phase separated, and one of the polymer blocks was removed by oxygen plasma ashing. The other polymer, which phase separated into spheres, was used as a mask for ion milling the magnetic film. Several Designs of Experiments were carried out with two different diblock copolymers, PS-PFS and P2VP-PDMS. We were able to achieve 30 nm nanodots reliably with 20 nm nanospheres. Another approach was to evaporate a Cr hard mask onto the nanosphere-coated magnetic multilayers. The nanospheres were then lifted off, leaving behind 15 nm nanopillars. Yet another approach was tried, with ultrasonic shrinking of the PFS nanospheres in toluene, which yielded 10 nm nanospheres, which would correspond to roughly 1.5 Tbpsi.
||Planned: Supplemental Proceedings volume